September 18, 2018
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Product
EBPG exchange at UMS - after 28 years
RAITH is excited to present to you the first all in one configurable SEM system for metrology, defect inspection and SEM review with a focus on gauge capability and workflow automation: VECTOR
Bridging the valley of death
Up until today people had to decide whether to use an analytical SEM for very good imaging but a lack in automation, precision and productivity or / and a highly automated CD SEM with excellent precision and automation capabilities but little image quality and flexibility. While this has been a decision between functionalities it has also been a monetary one. VECTOR bridges this gap – functionality and monetary wise.
On the one hand this enables innovators in research labs to overcome technical and financial hurdles to translate laboratory discoveries into designs that can be scaled up for commercial production in foundries or fabs. On the other hand it gives access to fab standards such as process control to basically any customer that has high demands for imaging, automation, precision, productivity and adaptiveness to best control and improve their work.
AI powered inspection and metrology – 3 in 1
VECTOR offers an integrated solution for automated high-resolution SEM imaging, automated metrology, and defect inspection on full wafer scale.
It is an automated SEM with absolute placement accuracy in the nm range and automatic corrections that allows you to take single images or thousands of them on different locations on the wafer. Due to its high precision you can also stitch single images seamless together for large-area imaging. On top of that the complete dataset of any measurement is always stored in the database allowing you to always check and compare how the imaging and metrology was executed.
VECTOR measures what is truly there and that with utmost precision. It is a metrology tool to optimize your processes for various parameters. That way you can not only improve your process but also increase your yield. With a traceable gauge capability (equipment variation below 1 nm) and recipe based evaluations it is especially valuable for process window analysis.
And as if that wasn’t enough already, VECTOR also comes with high-level defect inspection capabilities. Just use the KLARF-file import and our powerful AI technology to do defect detection and classification for you. With helpful data visualization you can create essential information out of statistical data, which helps you to control your processes easily and fast – again enabling you to optimize resources and yield.
From lithography to process control
RAITH is taking its core competencies from electron beam lithography and applies them to SEM imaging and Process Control. VECTOR includes:
- a laser interferometer stage
- A thermoshield
- A distortion free SEM column
- An advanced software and
- CAD file handing
All of this is making VECTOR the most comprehensive, accessible and affordable solution for metrology and inspection in nanofabrication. Learn more about the VECTOR and visit our product page or download the product brochure.
Are you interested in more details and insights?
VECTOR brochure (.pdf)
If you want to know more about RAITH’s developments regarding Process Control solutions, please contact us directly
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