Introduction
IONMASTER is the highest-resolution secondary ion mass spectrometry (SIMS) platform for cutting-edge elemental imaging at the nanoscale. Alongside accurate positioning, it delivers unparalleled sensitivity, revealing even the tiniest features with highest precision. By combining advanced magnetic sector SIMS technology with industry‑leading stability and detection performance, IONMASTER empowers you to generate reliable nanoscale SIMS data even on complex or sensitive samples.
Whether you need detailed elemental mapping, high‑resolution 3D sample reconstructions, or reproducible depth profiling, the system ensures a new level of analytical clarity at the nanometer scale.
Whether you need detailed elemental mapping, high‑resolution 3D sample reconstructions, or reproducible depth profiling, the system ensures a new level of analytical clarity at the nanometer scale.
Benefits
Unlock new capabilities with high‑precision SIMS analysis
Highest spatial resolution and sensitivity in SIMS analysis
IONMASTER’s high-brightness FIB provides reactive ion species, which significantly enhances SIMS performance. It enables ultra-high-resolution elemental mapping of less than 25 nm with superior sensitivity up to 2 ppm and outstanding spatial precision. The beam brightness increases signal intensity and analytical throughput, while reactive ions boost ionization efficiency. These advantages are essential in pushing SIMS capabilities beyond conventional limits, and deliver exceptional data quality for cutting-edge research and advanced materials characterization.
Fastest time to result with full-spectrum acquisition
magSIMS is a next-generation hyperspectral magnetic sector SIMS platform and the centerpiece of the IONMASTER. Engineered for maximum ion transmission and zero duty-cycle losses, magSIMS eliminates sequential mass scanning and allows full mass spectra acquisition with dramatically increased sensitivity and throughput. This ensures that no information is missed and, combined with the general ease of use of the system, allows results to be delivered as quickly as in two minutes
Best measurement repeatability
A laser interferometer stage enables automated sample positioning with highest precision as well as navigation directly on design (GDSII) or review files (KLARF) for SIMS analysis and elemental mapping. This delivers outstanding measurement repeatability, unmatched ease of use, and highly reliable, reproducible analytical results.
Best results through specific ion species
SIMS analysis is vital for understanding the chemical composition of all sorts of samples in all sorts of disciplines. In battery research, semiconductors, life sciences, material sciences, geology, or any other field, different samples require different ion species to deliver the best results. IonSelect allows you to choose the right specific primary ions and dedicated reactive ions for your application. Select light ions to minimize sample damage while maximizing lateral resolution, or go for heavy ions to give highest-depth resolution and high sputter yield.
Mag
SIMS
Ion
Select
Software
A new era in nano-characterization and imaging
User interface for SIMS analysis
IONMASTER OPS software controls all features and hardware components of the SIMS spectrometer.
IONMASTER VIEW software is used for rapidly viewing the acquired data files and performing measurements and data processing.
Furthermore, the proprietary Digital RAITH Nanosuite software operates all nanofabrication and imaging system functionalities.
IONMASTER VIEW software is used for rapidly viewing the acquired data files and performing measurements and data processing.
Furthermore, the proprietary Digital RAITH Nanosuite software operates all nanofabrication and imaging system functionalities.
Positioning and adjustment of the extraction system
Automated movement of transfer optics controls all voltages of SI optics. Additionally, switching between positive and negative SIMS analysis modes can be done within a few seconds.
Data acquisition for different analysis modes
Various analysis modes available: Live mode, Total Ion Count (TIC) imaging, Focal Plane Detector (FPD) mass spectrum recording, FPD depth profiling, FPD imaging, and FPD 3D imaging.
Magnet control
The magnetic field in the magnetic sector can be adjusted to select the desired mass range of the detected secondary ion.
Focal plane detectors
Simple and quick adjustment of the parameters to optimize the data acquisition of full continuous spectra.
100 person-years of software programming
Technical data
SIMS imaging resolution
< 25 nm
Sensitivity
< 2 ppm
Dynamic range
> 107
SIMS depth resolution
< 6 nm
Are you interested in more details and insights?
IONMASTER brochure (.pdf)
Application use cases
Highest-resolution SIMS imaging and analysis
3D SIMS reconstruction of 15 image planes from a CIGS solar cell. Rubidium (orange)is segregated in the grain boundaries of the Indium (gray).
20 µm x 20 µm x 200 nm
20 µm x 20 µm x 200 nm
RGB map of Lithium Ion Battery Electode Lamella showing the Co-59 (red), Mn-55 (green), and Li-6/7 (blue) distribution.
Sample courtesy of Pablo Maria Delfino, Luxembourg Institute of Science and Technology (LIST)
Sample courtesy of Pablo Maria Delfino, Luxembourg Institute of Science and Technology (LIST)
Top-down SIMS images of the CMOS image sensor at the polysilicon level revealing the Boron (green) and Silicon (blue) distribution.
Sample courtesy of Bavley Guerguis, McMaster University, Canada
Sample courtesy of Bavley Guerguis, McMaster University, Canada
Ion imaging analysis of cerium-exposed cells demonstrates a clear extracellular localization of cerium nanoparticles (red), with no significant accumulation within the cellular structure.
Sample courtesy of Frances Allen, UC Berkeley
Sample courtesy of Frances Allen, UC Berkeley
Ion image of a Tarda meteorite sample showing the spatial distribution of Fe (red), Ca (green), and Mg (blue), with Fe segregated into particles of varying size.
12C14N image of a cable bacteria revealing the microstructure of the filaments.
Sample courtesy of Yonggang Yang, Foshan University and Hryhoriy Stryhanyuk, UFZ Leipzig
Sample courtesy of Yonggang Yang, Foshan University and Hryhoriy Stryhanyuk, UFZ Leipzig
SIMS analysis of zirconium for investigating the hydrogen gettering effect of yttrium in zirconium-based alloys.
Reference: Materials Today Communications 50 (2026)
SIMS imaging at high resolution maps Si (blue) and Ti (red) in a 22 nm CMOS metal stack, revealing structural details across a 3 µm field of view with spatial resolution below 20 nm.
Reconstruction of a DRAM chip from 15 SIMS image planes revealing sub surface 39K contamination.
Solutions
RAITH offers integrated solutions that increase performance and create market opportunities. In any production environment.
Mix and Match
Seamless blending of laser direct writing, ion beam, and electron beam technologies, unlocking new nanostructuring horizons.
