Introduction
The MagSIMS consists of a dedicated secondary ion extraction optics followed by post-acceleration optics, transfer optics, a modified Mattauch-Herzog double focusing magnetic sector mass analyzer and a continuous focal plane detector for parallel detection of all ions.
It is designed and integrated in such a way that the secondary ion extraction optics can be inserted in between the sample and the objective lens of the FIB column during SIMS operation, while being retracted to a parking position on the side of the chamber for normal FIB operation.
It is designed and integrated in such a way that the secondary ion extraction optics can be inserted in between the sample and the objective lens of the FIB column during SIMS operation, while being retracted to a parking position on the side of the chamber for normal FIB operation.
Experience unparalleled visualization of nanoscale structures and chemical information
Key features
For highest sensitivity and transmission.
Records a full mass spectrum of each pixel. Easy and fast alignment of detection system, excellent data post-processing capabilities.
No duty cycles, very short data acquisition times.
Benefits for applications
MagSIMS takes nano characterization to the next level
Fast
magSIMS delivers true hyperspectral SIMS imaging with over 120,000 full mass spectra per minute, eliminating duty-cycle losses.
Easy
magSIMS is optimized for shortest setup time and immediate measurement start for efficient, repeatable workflows
Powerful
magSIMS delivers maximum lateral resolution and ultimate sensitivity through complete mass spectra collection with zero information loss and maximum ion transmission
Technical details
Precision technology developed to challenge the frontiers of nanotechnology
Mass spectrometer
MagSIMS features a double focussing Mattauch-Herzog mass spectrometer for the precise measurement of the mass-to-charge ratio (m/z) of ions. The advantage of a double-focusing mass spectrometer is high-resolution capability and accurate measurements of m/z ratios for a wide range of ions. This makes it particularly useful for applications in analytical chemistry, isotope ratio measurements, and the study of complex mixtures of compounds.
Results
Detection of all elements and isotopes
Easy detection of light elements like Hydrogen or Lithium
Reliable identification of nanoparticles
Analysis of thin interfaces and films
3D chemical analysis at the nanoscale
Application use cases
High-Sensitivity SIMS Depth Profiling of epitaxially grown GaAs/ GaAsAl stack with 2D In features within active region for process validation.
Sample courtesy of Olaf Brox, Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik (FBH).
Sample courtesy of Olaf Brox, Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik (FBH).
Cross-sectional SIMS elemental map of the CMOS image sensor showing the Hf (red), Ti (green) and Si (blue) distribution representing the depth distribution within the device.
Sample courtesy of Bavley Guerguis, McMaster University, Canada
Sample courtesy of Bavley Guerguis, McMaster University, Canada
High resolution SIMS imaging enables isotopic mapping of Si (blue) and Ti (red) within a 22 nm CMOS metal stack. Structural details are resolved across a 3 µm field of view with spatial resolution below 20 nm.
SIMS overlay of the SE image (gray) and the rubidium signal (purple), revealing Rb segregation along the grain boundaries at the CIGS surface.
Ion imaging of cerium-exposed cells demonstrates that cerium nanoparticles (red) are segregated outside the cellular structure, without intracellular presence.
Sample courtesy of Frances Allen, UC Berkeley
Sample courtesy of Frances Allen, UC Berkeley
High-resolution 2D SIMS map of a solid-electrolyte Li-ion battery reveal that Li is preferentially localized at aluminium grain boundaries.
Sample courtesy of Fraunhofer IKTS, Dresden
Sample courtesy of Fraunhofer IKTS, Dresden
