Raith EBPG5200 EBL at Chalmers University of Technology, Sweden

Chalmers University of Technology in Gothenburg, Sweden, selected Raith to install an EBPG5200 high-resolution lithography system at their Nanofabrication Laboratory of the Department of Microtechnology and Nanoscience – MC2.

Foto of Chalmers University

Raith is very proud to have been chosen by a world-class university cleanroom involved in micro- and nanotechnology in the field of quantum and microwave/photonic devices. The highly advanced requirements that arise in those application fields are readily fullfilled by the EBPG, a system designed to handle small piece parts up to full 8” wafers. As well as a 100 MHz pattern generator and large 1mm field size, it is supplied with a 10-holder airlock, enabling multiple samples to be loaded and then processed automatically without further manual intervention.

The EBL system was successfully installed and accepted a few months ago, so that the team at MC2 has been able to work on it for a while. “Now that the system has been in use for some time by various researchers, we can confirm that it delivers the lithography quality, flexibility and ease of use as we had specified – the three most important criteria we had for the new system,” say Peter Modh, Head of the Nanofabrication Laboratory, and Marcus Rommel, Senior Lithography Engineer.

Chalmers brief

Situated in Gothenburg, Sweden, Chalmers University of Technology has 11,000 full-time students and 3,000 employees. 

Chalmers was founded in 1829 following a donation by William Chalmers, a director of the Swedish East India Company. 

The Department of Microtechnology and Nanoscience – MC2 is a unique research department in the areas of micro- and nanotechnology, housing more than 200 researchers and PhD students. 

The Nanofabrication Laboratory belonging to MC2 is a world-class university cleanroom for research into, and fabrication of, micro- and nanotechnology. The cleanroom operation in its current form was started in 2001.
The Laboratory is a state-of-the-art facility and has 1240 m² of cleanroom classified area with process and measurement tools providing a broad platform for the development and testing of new ideas in micro- and nanotechnology. 

The Laboratory is also a member of Myfab, the Swedish Research Infrastructure for Micro and Nano Fabrication, www.myfab.se.