Our cutting-edge electron beam lithography systems provide solutions for diverse application challenges, ensuring optimal throughput, full automation, ultimate stability, highest precision, and versatility for advanced nanotechnology.
Electron beam lithography is vital for creating nano-scaled components crucial to shaping tomorrow’s devices, especially in semiconductors, optoelectronics, or quantum technologies. Whether in industry or academia, these systems are essential for global micro- and nano-scale device fabrication, serving as the backbone of complex technological processes. Considering the interplay between relevant system components and adopting a holistic view of the entire system has been a major design criterion for all RAITH products.
High resolution
Maximum throughput
Full automation
Versatility and flexibility
Dive into the fascinating world of electron beam lithography
Our customers are excited with their experiences using our products. They emphasize the precision, versatility, and reliability, highlighting how it has improved their approach to nanotechnology and advanced electronics manufacturing.
EBPG at University of California, Berkeley, Irfan Siddiqi
We interviewed Irfan Siddiqi, Professor at UC Berkeley, and asked him for his honest opinion about using a RAITH EBPG5150. Next to describing his user experience, he gives insight […]
EBPG at University of California, San Diego, Maribel Montero
The main user and specialist of the EBPG installed at UCSD is Maribel Montero. She provides insights into her daily work with the system and explains why she is a satisfied RAITH […]
EBPG at the University of Queensland, Christiaan Bekker
“At the University of Queensland, we recently bought two Raith EBL systems: the eLINE Plus, which was commissioned in 2017, and the EBPG, which arrived in 2018. This has revolutionised […]
EBPG5200 at the KIT Karlsruher Institute of Technology, Dr. Lothar Hahn
“We decided on an EBPG5200, which combines three functions that are essential in research: a high level of precision, high flexibility, and reliability of use. This combination is critical in […]
“As my colleague Rich Tiberio put it, “A one hundred hour installation, from loading dock to 50 kV SEM and initial e-beam calibration, could not have been possible without a very efficient design […]
VOYAGER at the KTH Royal Institute of Technology, Adrian Lovan
“It is my pleasure to say a few words about the ebeam system which we have in the lab: VOYAGER from RAITH. We have had the system in the lab for more then 3 years now and have had […]
VOYAGER at the University of York, Prof. Thomas Krauss
“The reason I decided to buy this is that RAITH built an entirely new system rather than optimising an existing concept; this allowed them to benefit from all the recent developments, […]
VOYAGER at the Virginia Commonwealth University, Dr. Nathaniel Kinsey
“One area of focus for research in the College of Engineering at Virginia Commonwealth University revolves around the development of metamaterials, integrated nanophotonics, and […]
ELPHY at University of California Riverside, Jay LeFebvre
“Recently, the Oxide-Nano Electronics Laboratory (ONELAB) at the University of California, Riverside had the Raith ELPHY lithography add-on installed to a helium focused ion beam system […]
eLINE Plus at the Imperial College London, Dr. Javier Cambiasso
“We have been using RAITH eLINE for the last 8 years, and yet we bought a second one (in fact two more, one for our group at Imperial College London and one for our new group […]
eLINE Plus at the University of Stuttgart, Max-Planck-Institute for Solid State Research, Stuttgart, Prof. Dr. Laura Na Liu
“Our group has been using the RAITH eLINE Plus at different affiliations for several years and we are still amazed by its outstanding performance. The unequaled versatility has […]
“NanoFabrication Kingston, the micro/nanofabrication facility at Queen’s University in Kingston, Ontario, Canada, opened in 2015 with a RAITH PIONEER as its cornerstone tool. Since then, users […]
