Laser Lithography

Our maskless laser beam lithography systems offer the highest resolution in the market. They combine the best performance in resolution and grayscale capabilities with user-friendliness in a portfolio of products that can address any need.

Your benefits

Explore our innovative multi-beam technology, offering accelerated throughput while maintaining scalable resolution. Alternatively, delve into the unparalleled precision and flexibility of our single-beam systems, boasting top-tier lateral and gray-level resolutions available in the market. Designed with user-friendliness in mind, our systems are highly versatile and adaptable, ensuring they not only meet but surpass your expectations.

Best-in-class lateral resolution

Highest gray-level definition

High throughput

Easy to use

Your applications categories

Our laser lithography applications span from the microfabrication of everyday products to cutting-edge scientific research.

Our process

Precision: Our passion in workflow and nanofabrication

01

Spin coating

A thin layer of photoresist is applied onto a substrate by spin-coating it at a high rotational speed. The homogeneity and cleanliness of this layer are critical.
02

Soft bake

Excess solvent is evaporated by baking the wafer on a hot plate or in a convection oven. A rehydration pause after this step ensures repeatable processes.
03

Exposure

This is where our Laser Beam Lithography tools come into play, writing sub-micron-sized features in the photoresist layer.
04

Development

The exposed photoresist regions are washed away (positive PR), revealing the pattern for further processing to create a specific device.

References

Our customers are excited with their experiences using our products. They emphasize the precision, versatility, and reliability, highlighting how it has improved their approach to nanotechnology and advanced electronics manufacturing.

PICOMASTER at University of Osnabrück, Prof Dr. Wolfgang Harneit, PD Dr. Carola Meyer, Mykola Fomin and Nidhin Varghese

A few weeks ago, we visited the University of Onsabrück, a proud user of a RAITH PICOMASTER. We are very happy to see another customer succeed, while challenging the frontiers of nanotechnology. […]

PICOMASTER at University of Konstanz, Dr. Matthias Hagner and Emilia Schütz

Visiting Dr. Matthias Hagner and Emilia Schütz at the University of Konstanz, Germany was a real pleasure! We asked them for their honest opinion using the PICOMASTER and got insights into […]

Are you interested in more details and insights?
SPIE Paper for photonic crystal array with XF 200
URL is missing, what is the correct URL?
To find out which configuration best suits your needs, get in touch with us.
I want to contact a RAITH-Expert
Headline
This is a basic text element.
Headline
This is a basic text element.