IONMASTER

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IONMASTER

SIMS nanoanalytics and ion imaging

Introduction

IONMASTER is a novel ion microscope with a dedicated magnetic sector Secondary Ion Mass Spectrometer (SIMS). It is the perfect tool for the highest resolution SIMS imaging, offering unparalleled sensitivity in detecting even the smallest features. Experience a revolution in nanotechnology, opening new frontiers for a wide range of applications.

Key features

Multi ion species from a liquid metal alloy ion source (LMAIS) for application specific primary ions and dedicated reactive ions
MagSIMS with extraction and transfer optic, magnetic sector and continuous focal plane detector
Full mass spectrum of each sample pixel for multiplex SIMS imaging
Laser interferometer stage with ultra accurate sample positioning at nm precision, blind navigation to ROI to enable analysis on pristine sample areas
CAD based SIMS analysis
High resolution ion imaging

Schematic working principle of the IONMASTER with MagSIMS, IonSelect and UltraPositioning.

Benefits

Experience FIB-SIMS beyond limits

Highest spatial resolution and sensitivity

IONMASTER offers various application-specific primary ions to optimize results. Dedicated reactive primary ions enable the best ionization yield, and light or heavy ions adjust the sputter yield. IONMASTER magSIMS, with its sophisticated extraction and transfer optics, ensures the highest transmission of secondary ions, guaranteeing optimal performance for any analytical challenge.

Shortest time to result

Featuring a focal plane detector that acquires full mass spectra of each pixel simultaneously and a magnetic sector for mass separation without duty cycles, it delivers results in the shortest time. In combination with a vast selection of primary ions, the sputter yield and ionization of secondary ions can be optimized. Use light ions to minimize sample damage while maintaining the highest lateral resolution, or choose heavy ions for the highest depth resolution and high sputter yield.

SIMS analysis with ion microscopy and nanofabrication

Correlative SIMS and SE ion imaging for multimodal analysis enables comprehensive sample information. The high-precision laser interferometer stage allows for precise CAD-based multisite analysis and blind navigation for the analysis of pristine sample areas. Advanced nanofabrication workflows and milling strategies ensure superior analytical performance, elevating ion nanofabrication capabilities to the next level.

Ion

Select

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Mag

SIMS

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Ultra

Positioning

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Smart

Motion

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Software

A new era in nano-characterization and imaging

User interface for SIMS analysis

IONMASTER OPS software controls all features and hardware components of the SIMS spectrometer.

IONMASTER VIEW software is used for rapidly viewing the acquired data files and performing measurements and data processing.

Furthermore, the proprietary Digital RAITH Nanosuite software operates all nanofabrication and imaging system functionalities.

Positioning and adjustment of the extraction system

Automated movement of transfer optics controls all voltages of SI optics. Additionally, switching between positive and negative SIMS analysis modes can be done within a few seconds.

Data acquisition for different analysis modes

Various analysis modes available: Live mode, Total Ion Count (TIC) imaging, Focal Plane Detector (FPD) mass spectrum recording, FPD depth profiling, FPD imaging, and FPD 3D imaging.

Magnet control

The magnetic field in the magnetic sector can be adjusted to select the desired mass range of the detected secondary ion.

Focal plane detectors

Simple and quick adjustment of the parameters to optimize the data acquisition of full continuous spectra.

100 person-years of software programming

Technical data

Lateral SIMS imaging resolution

< 20 nm

Dynamic range / Sensitivity

10⁷ / < 10 ppm

Polarity of secondary ions

selectable,
positive / negative

SE Imaging resolution by using the TIC in the negative mode

≤ 5 nm

Detectable elements / isotopes

All

SIMS depth resolution

< 10 nm

Are you interested in more details and insights?

IONMASTER brochure (.pdf)

1 file(s) 3.17 MB

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Application use cases

Highest-resolution SIMS imaging and depth profiling

SE surface signal of a (Rb) treated CIGS solar cell with Rb SIMS overlay

Multimodal analysis: Ion induced SE surface signal (gray) of a Rubidium (Rb) treated CIGS solar cell with Rb SIMS overlay (purple)

Mass spectrum of CIGS solar cell in positive mode. A full mass spectrum is acquired for each pixel during SIMS mapping

3D SIMS reconstruction of the Rubidium(⁸⁵Rb & ⁸⁷Rb) isotopes (orange) and Indium(¹¹³In & ¹¹⁵In) (gray) isotopes. Rubidium is segregated in the grain boundaries of the CIGS surface

Mouse gut cells with nanoparticles: Aluminum nanoparticles (red) are clearly detected and resolved outside the cells, showing distribution around the cell body

3D SIMS reconstruction of Ni (red) – Ti (green) multilayer micropillars on Cr substrate (blue), diameter 1um, layer thickness 10 nm – 50 nm

SIMS image of a diatom composed of Si and SiO2 signal multiplexing

SIMS image of a diatom composed of Si and SiO₂ signal multiplexing

Ion images revealing the high depth of field and high image resolution. Li ion beam image of Bi₂ Ca₂Co compound material

Li ion image of diatoms

Si ion image of diatoms

Explore ion microscopy with SIMS analysis for high-resolution nano-analytics.

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Solutions

RAITH offers integrated solutions that increase performance and create market opportunities. In any production environment.

Patterning

By eliminating stitching errors, our solution guarantees optimal performance and reliability, driving breakthroughs.

Patterning Solution

Mix and Match

Seamless blending of laser direct writing, ion beam, and electron beam technologies, unlocking new nanostructuring horizons.

Mix and Match Solution

News

Raith's SIMS Nanoanalytics and Ion Imaging product Ionmaster is perfect for the highest resolution SIMS analysis.

Introducing IONMASTER: Pushing FIB – SIMS beyond limits

At the forefront of nanotechnology, RAITH proudly introduces the IONMASTER, a state-of-the-art, high-resolution analytical ion microscope with unmatched nanofabrication capabilities. This groundbreaking instrument is designed to redefine the boundaries of advanced materials characterization.

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Photograph of RAITH and LIST colleagues at the ribbon cutting ceremony of collaboration on MagSIMS

RAITH and LIST announce partnership

On February 22nd, we signed an agreement with the Luxembourg Institute of Science and Technology (LIST) to join forces and bring the cutting-edge MagSIMS (Secondary Ion Mass Spectrometry) technology to the global […]

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