Patterning

Introduction

In nanotechnology, stitch-free nanopatterning is crucial for achieving precise and seamless fabrication at the nanoscale. Stitching errors are a common and significant issue in nanolithography. A pattern written by nano­lithography is often larger than the size of the write field that can be exposed by the electron or ion beam without moving the stage. Traditional stitching methods frequently introduce imperfections, compromising the integrity and functionality of nanodevices.

By eliminating stitches, nano­fabrication processes can maintain uniformity and accuracy, essential for creating intricate structures with minimal defects. This approach ensures optimal performance and reliability in nanotechnological applications, enabling break­throughs in fields such as electronics, photonics, and optics, where precision is paramount.

Benefits

Unlocking possibilities

RAITH technologies make even the most challenging designs possible, offering advanced solutions and precise tools for fast design development.

Enhancing final device quality

Various stitch-free methods available for different RAITH tools ensure that your final device quality will not be compromised and will be delivered as it was supposed.

From m² to nm

Achieve sub-micron precision even on 1-meter substrates for flat TV panels with RAITH tools. Our stitch-free technology ensures quality patterning from square meters to nanometers.
Patterning solutions for seamless designs
Elements
When small things needs to be big

Applications for patterning

Key factors
0 nm
Stitching error
Complete stitch-free strategies: PathControl technology allows entirely stitch-free exposures
1400 x 1400
Millimeters
Unparalleled speed allows submicron patterning over huge substrates up to 2 square meters
1.000.000.000
Elements
A metalens may contain even more elements, all of them need to be positioned with nanometer precision
Application patterns

Waveguides

Stitch-free exposure of photonic circuits with PathControl technology

Photonic crystal

Stitch-free photonic crystal waveguide exposed by periodic patterning
SEM image of a metalens structure

Metalenses

Exposure of large photonic designs without data transfer overhead by algorithmic patterning

DFB gratings

Pitch control with sub-nm resolution

Complex shapes

User-defined shapes enabled by algorithmic patterning

User-defined data formats

Streamlined pattern transfer with user-fined design data processing by algorithmic patterning
To find out which configuration best suits your needs, get in touch with us.
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