Digital RAITH

Introduction

Software is your interface to nanofabrication. It needs to support your tasks efficiently by providing all the required functionality in an ergonomic, easy-to-use way. Understanding nanotechnology, listening to customer needs, and expertise in nanotechnology software engineering are key factors for building systems for nanofabrication with state-of-the-art software. Rely on mature nanotechnology software solutions, continuously developed over decades.

40 years experience in developing software

Continuously developed software solutions

Highly skilled software engineering team

Nanotechnology software is the game-changer, revolutionizing the way we work

Benefits

System control

Comprehensive system control of hardware including functionalities for all general and special needs in lithography e.g., sample alignment, focus control, drift correction, batch jobs, stitch-free and algorithmic patterning. The software supports multi-user environments.

Pattern and job preparation

Various solutions for importing and editing layouts, fracturing, shape conversion, proximity effect correction, process simulation, 3D lithography, metrology, and recipe management.

Automation and wafer handling

Various solutions for automation such as automatic mark recognition, scripting for customizing workflows, different wafer and mask sizes, and multi-sample exposures.
RAITH software stacks and their modules

01 Digital RAITH Beams

Controlling the system and continuously monitoring its status for the EBPG. Built on Linux, it offers both command-line interfaces and graphical user interfaces (GUIs) for all essential system interactions, whether related to job preparation and execution, system calibration, or testing.

Overall graphical interface Cebpg

Exposure job preparation Cjob

Cview pattern inspection

True multi-user management system

Check the specific software features

02 Digital RAITH Laser

Project Manager Holography libraries give you the freedom to build, modify, and realize designs with ease.

2D to 2.5D patterns at your fingertips

Broad variety of holographic effects

Ease of use

03 Digital RAITH Nanosuite

The proprietary Digital RAITH Nanosuite control software, with its various modules, is the most comprehensive and fully integrated nanolithography software available.

GDSII CAD layout editor

Mix and Match capabilities

Full exposure job automation & customization

Dedicated imaging and metrology functionality

True multi user environment

Proximity Effect Correction

3D / grayscale lithography

GDSII-Patterning on image

Continuous and stitch-error-free patterning modes

Algorithmic patterning

To find out which configuration best suits your needs, get in touch with us.
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