July 16, 2024
Introduction
Plasmonic structures are typically extremely small and exhibit features in the sub several 10 nm, if not single digit nm-range and require a good pattern fidelity on that length scale with respect to geometry and line edge roughness. That is why excellent ultra-high resolution capabilities, paired with specific exposure strategies (FLEXposure or using shapes) – something that all RAITH EBL systems can provide – are crucial for best pattern definition and are resulting in high performant devices.
Application
Nanoantennas
Nanoantennas are minuscule structures engineered to manipulate light at nanoscale dimensions. These antennas are designed to interact with electromagnetic radiation, typically in the visible or infrared spectrum. By exploiting plasmonic effects, nanoantennas can concentrate and manipulate light with unprecedented precision, enabling a variety of applications in sensing, imaging, and telecommunications. Their size and versatility make them promising candidates for enhancing the efficiency of solar cells, improving the resolution of optical microscopy, and enabling novel techniques in nanoscale spectroscopy. Nanoantennas hold immense potential for revolutionizing various fields by harnessing the unique properties of light at the nanoscale.
Metalens structure using efficient formula based patterningMetalens structure using efficient formula based patterningMetalens structure using efficien
150 nm gate in PMMA (bi-layer)
Freestanding multi-terminal graphene device M. Kühne, MPI Stuttgart, Germany
Application
Sensors
Nanosensors are miniature devices designed to detect and respond to specific physical, chemical, or biological stimuli at the nanoscale level. Utilizing nanotechnology, these sensors exploit the unique properties of nanomaterials to achieve high sensitivity and selectivity. Nanosensors find applications in various fields, including healthcare, environmental monitoring, and food safety. Their small size allows for integration into wearable devices, implantable systems, and even smartphone platforms, enabling real-time, on-site detection of target analytes. With continuous advancements in nanofabrication techniques and sensor design, nanosensors are poised to play a crucial role in revolutionizing diagnostics, safety, and quality control across diverse industries.
Metalens structure using efficient formula based patterningMetalens structure using efficient formula based patterningMetalens structure using efficien
150 nm gate in PMMA (bi-layer)
Freestanding multi-terminal graphene device M. Kühne, MPI Stuttgart, Germany
Discoveries and innovations