Introduction
Innovative NEMS / MEMS devices typically connect the smallest scale, oftentimes single-nm-sized features with larger design elements. This requires either excellent mix and match capabilities or good and efficient parameter switching capabilities, for example, for course and fine writing with different beam currents. RAITH has optimized its systems such that significant overhead due to system stabilization and recalibration after parameter switching can be minimized, if not avoided altogether.
Application
Sensors
Nanosensors are miniature devices designed to detect and respond to specific physical, chemical, or biological stimuli at the nanoscale level. Utilizing nanotechnology, these sensors exploit the unique properties of nanomaterials to achieve high sensitivity and selectivity. Nanosensors find applications in various fields, including healthcare, environmental monitoring, and food safety. Their small size allows for integration into wearable devices, implantable systems, and even smartphone platforms, enabling real-time, on-site detection of target analytes. With continuous advancements in nanofabrication techniques and sensor design, nanosensors are poised to play a crucial role in revolutionizing diagnostics, safety, and quality control across diverse industries.
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150 nm gate in PMMA (bi-layer)
Freestanding multi-terminal graphene device M. Kühne, MPI Stuttgart, Germany