Introduction
Microfluidic channels are often used for lab-on-a-chip or other life science applications and require long range uniformity, good pattern definition and high throughput, all of which RAITH laser lithography systems provide. The same applies for micro- and nanobiology applications, incl. dielectrophoretic applications. Sometimes, there is a need for adding smaller features that can be fabricated using mix and match exposure strategies incorporating successive laser and electron beam lithography steps. Complimentary and well aligned workflows, also called RAITH connectivities, help to efficiently combine these two technologies, thus enhancing throughput.
For example, nanofluidic channels required for x-ray waveguides, need the ultimate line edge roughness, as any kink or stithic ng error will significantly degenerate the device performance. Here, stitch-free moving stage functionality, which is unique for RAITH systems, is the solution.
For example, nanofluidic channels required for x-ray waveguides, need the ultimate line edge roughness, as any kink or stithic ng error will significantly degenerate the device performance. Here, stitch-free moving stage functionality, which is unique for RAITH systems, is the solution.
Application pattern
Nanofluidic mixer
A nanofluidic mixer is a cutting-edge device designed for precise manipulation and blending of minuscule fluid volumes at the nanoscale level. Leveraging the principles of nanotechnology and fluid dynamics, it enables the controlled mixing of different fluids, crucial in fields like pharmaceuticals, biotechnology, and chemical engineering. Through intricate channels and chambers, nanofluidic mixers induce controlled turbulence and molecular diffusion, ensuring rapid and efficient blending of substances while minimizing waste and contamination. These mixers hold promise for revolutionizing various industries by facilitating the development of advanced drug delivery systems, enhancing biochemical reactions for sensors and diagnostics, and enabling the creation of novel materials with tailored properties.
3D stitching and FIB milling enables a 1 mm long microfluidic mixer channel, Argonne National Laboratory
150 nm gate in PMMA (bi-layer)
Freestanding multi-terminal graphene device M. Kühne, MPI Stuttgart, Germany