Laser beam lithography on your table

Picture of the laser beam lithography table top system MICROMASTER

Laser beam lithography on your table

MICROMASTER is an entry-level maskless laser writer for laser beam lithography. Its table-top compact design requires minimum cleanroom space, but still delivers uncompromisingingly high-quality resolution below 1 µm and full grayscale capability up to 4096 levels.

Features include:

  • Competitive 0.8 µm resolution
  • Optional writing modes with 1.5 µm, 2.5 µm and 5 µm resolution
  • Long-life 405 nm diode laser
  • 375 nm source optionally available for i-Line resists
  • Automatic switching between writing modes
  • <0.5 µm 2nd-layer alignment accuracy

MICROMASTER enables the creation of various 2D and 2.5D microstructures in photosensitive resists right after installation. Laser beam lithography becomes accessible to everyone with the entry-level MICROMASTER tool, which is already successfully used by different research groups around the world for a broad variety of applications in research, semiconductors, photonics, mask making, 3D lithography, diffractive optical elements, microfluidics, and many more.


If you have any questions or need more information, just get in touch!



< 0.8 µm

Grayscale levels


Laser sources

405 / 375 nm

MICROMASTER is the ideal R&D tool for any lab to get a fast start in laser beam lithography

The MicroMaster is an entry-level maskless laser writer with high-precision components. It is specifically designed to maximize users’ freedom to create microstructures in photosensitive layers.

This versatile tool includes a proprietary optical module which enables sub-micron-resolution lithography capabilities with real-time hybrid autofocus and precise laser intensity control, ensuring high-quality results throughout the exposure process. User-friendly MICROMASTER Project Manager and MICROMASTER Machine Controller software are supplied, so that the training time required to start laser beam lithography jobs is short.

Contact us
Photo of three people working in the Raith Service and Support Center

Raith Service - with you all the way

Where laser beam lithography systems are concerned, a system’s unique capabilities and performance quality are certainly among the main drivers for decision-making. However, there are further factors to be taken into account, including efficient operation, continuous uptime, and subsequent reliable support over the whole system’s lifetime, which are always appreciated by our customers.

With a worldwide team of professional service engineers, Raith Service ensures that you can make the best use of your system. When you decide on a Raith system, support with the process setup, factory and on-site acceptances, and comprehensive on-site trainings are always provided with the systems. Moreover, complementary application support is available in different time zones.

Raith service contracts follow a modular scheme and can be configured to match your individual requirements and budget. Visit our Service site or get in touch with us to learn more.


Download the PICOMASTER series product flyer