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By enabling a wide variety of applications for industry and academia, we enable building their digital future.
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Our nanofabrication solutions pave the way from breakthrough innovations and rapid prototyping to volume production of nanotechnology devices.
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Our unique combination of high-precision writing, imaging and analysis tools is designed to meet the most demanding requirements in the field, providing unparalleled precision and efficiency.
Electron Beam Lithography
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Imaging & Analysis
Explore Electron Beam Lithography, the crucial technology for generating nanostructures essential in shaping tomorrow’s devices, particularly in semiconductors, optoelectronics, and quantum technologies
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EBPG
Highest throughput, automation, and precision
VOYAGER
High performance for shortest time to result
Pioneer | E-LINE | Raith150
Multifunctional system family for maximum versatility
ELPHY
Upgrade kit for SEM, FIB-SEM, or HIM
Experience Ion Beams across various fields with our FIB-SEM Nanofabrication, Ion Microscopy, and SIMS Nanoanalytics systems
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Velion
Multi ion species FIB‑SEM
IONMASTER
SIMS nanoanalytics and ion imaging
ELPHY
Upgrade kit for SEM, FIB-SEM, or HIM
Discover Laser Lithography with multi-beam technology for enhanced throughput and scalable resolution, or choose single-beam systems with unmatched lateral and gray-level resolutions
Product Overview
PICOMASTER
Direct laser writers with ultimate resolution
Picomaster XF
Highest-throughput grayscale lithography
ATHOS
Light-years ahead in optical security and holographic packaging
Explore precise imaging and analysis tools for enhanced understanding and progress, offering a wide range of capabilities - from large-area 3D imaging to comprehensive process control and extensive material analysis.
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Chipscanner
Large-area 3D SEM imaging
IONMASTER
SIMS nanoanalytics and ion imaging
VECTOR
AI-powered inspection and metrology
Electron Beam Lithography
EBPG
VOYAGER
Pioneer | E-LINE | Raith150
ELPHY
Focused Ion Beams
Velion
IONMASTER
ELPHY
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PICOMASTER
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ATHOS
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We continually push the boundaries of nanotechnology, a commitment we take very seriously. Over the past four decades, our intense focus and dedication have led to numerous groundbreaking innovations.
Exploring the depths of nanotechnology.
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March 17, 2026
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March 19, 2026
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Expert Workshop Registration
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Dortmund, Germany
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